Ebara Dry Vacuum Pump

With two claw-shaped rotors turn in opposite direction inside the housing. Due to the shape of these claw rotors, the air or gas is sucked in, compressed and then discharged. The claw rotors do not come into contact with each other or with the cylinder in which they are rotating. Tight clearances between the claw rotors and the housing optimize the internal seal and porvide a consistently high pumping speed. A synchronization gearbox ensures exact synchronization of claw rotors.

The rotary claw operation principle reduces energy consumption considerably in comparison with conventional vacuum pumps so energy costs are reduced. Due to their near maintenance-free operation, a decrease in operating costs adds to the savings; no maintenance downtime occurs, no wearing parts or operating fluids need to be changed – only a gear box oil change is recommended after every 20,000 hours. When compared to conventional vacuum pump solutions, Mink claw vacuum pumps can save up to 60% on energy and operating costs.

The EV-A Series is a family of air-cooled, dry pumps that have industry-leading specifications. The family consists of the EV-A3 (9 cfm), the EV-A6 (21.6 cfm), and the EV-A10 (36 cfm) pumps. Typical applications include Load Locks, PVD Systems, Analytical Instruments and Electron Microscopes. These pumps are ideal for replacing wet pumps as well as Scroll type dry vacuum pumps. 

EV-A pumps are manufactured by Ebara Technologies of Japan.

Features and Benefits  ev-a.png
Small Air-Cooling Pump
No-Contact Design
High Pumping Speeds at Atmosphere
Highest Water Vapor Pumping of Any Air-Cooled Dry Pump
UL, CE, and NRTL rated
Single- and Three-Phase Versions Available

 

Applications
Load Locks
Analytical Instruments (LCMS, ICPMS)
Electron Microscopes
PVD Systems
Oxygen Plasma Systems

 

Model EV-A03

 $7,500.00 Each

The Model EV-A03 air cooled dry pump offers high pumping speed (9 cfm) and high water vapor pumping (250 g/hr) when used with the optional gas ballast valve. The pump is available with optional casters/levelers.

 

Specifications
Pumping Speed, l/min Max 250 ev-a03-large.png
  Atmospheric Open 150
Ultimate Pressure, Pa Gas Ballast: Off 1.0
  Gas Ballast: On 10.0
Max. Inlet Pressure   Atmospheric Pressure
Max. Water Vapor Pumping
Rate (at Gas Ballast: On), g/hr
  250
Connection Gas Inlet NW25
  Gas Outlet NW25
Approx. Power at Ultimate Pressure, kW   0.34
Weight kg 23
  lbs 51
Power Supply [1 Phase/100V model] 1 Phase, 100-115V, 50/60Hz
  [1 Phase/200V model] 1 Phase, 200-240V, 50/60Hz
  [3 Phase/200V model] 3 Phase, 200-240V, 50/60Hz

 

 

Model EV-A06

 $9,500.00 Each 

The Model EV-A06 air cooled dry pump offers high pumping speed (21.6 cfm) and high water vapor pumping (350 g/hr) when used with the optional gas ballast valve. The pump is available with optional casters/levelers.

 

Specifications
Pumping Speed, l/min Max 600 ev-a06-large.png
  Atmospheric Open 480 
Ultimate Pressure, Pa Gas Ballast: Off 1.0
  Gas Ballast: On 10.0
Max. Inlet Pressure   Atmospheric Pressure
Max. Water Vapor Pumping
Rate (at Gas Ballast: On), g/hr
  350
Connection Gas Inlet NW40
  Gas Outlet NW25
Approx. Power at Ultimate Pressure, kW   0.59
Weight kg 54
  lbs 119
Power Supply [1 Phase/100V model] 1 Phase, 100-115V, 50/60Hz
  [1 Phase/200V model] 1 Phase, 200-240V, 50/60Hz
  [3 Phase/200V model] 3 Phase, 200-240V, 50/60Hz

 

 

Model EV-A10

$11,500.00 Each 

The Model EV-A10 air cooled dry pump offers industry leading specifications in an air cooled dry pump. The pump comes standard with four lockable casters/levelers.

 

Specifications
Pumping Speed, l/min Max 1000 ev-a10-large.png
  Atmospheric Open 800
Ultimate Pressure, Pa Gas Ballast: Off 1.0
  Gas Ballast: On 2.0
Max. Inlet Pressure   Atmospheric Pressure
Max. Water Vapor Pumping
Rate (at Gas Ballast: On), g/hr
  500
Connection Gas Inlet NW40
  Gas Outlet NW25
Approx. Power at Ultimate Pressure, kW   1.1
Weight kg 72
  lbs 159
Power Supply [1 Phase/100V model] ------
  [1 Phase/200V model] 1 Phase, 200-240V, 50/60Hz
  [3 Phase/200V model] 3 Phase, 200-240V, 50/60Hz