VSH88D

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Description

Description

Absolute Pressure 1000 to 5 x 10-10 mbar

The digital combination transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors.
Smartline represents cutting edge technology providing safe, precise and cost effective process control.

Benefits

  • Wide range sensor Pirani / Bayard Alpert
  • Pirani with extended range allows operation of hot cathode at lower pressure and increases lifetime
  • Excellent accuracy and repeatability
  • Bayard-Alpert with blowing resistant, yttrium coated double filament, insensitive against inrush of air
  • Digital RS485 interface and analog output signal 1.219-8.6 V or EtherCAT
  • Automatic baud rate detection 9.6 kBd to 115 kBd
  • Two independent, potential-free relay switch points
  • Optionally with large, integrated LCD display with background illumination (VSH88DL, VSH89DL)
  • Easily replaceable sensor heads with stored calibration data

Typical Applications

  • Coating plants and vapor deposition
  • Sputtering plants
  • Analysis technology
  • Measuring and controlling in the fine and ultrahigh vacuum range
  • Vacuum furnaces
  • Process engineering
  • Space simulation chambers
Measuring Principle Pirani / Bayard Alpert, depending on gas type
Materials In Contact With Vacuum Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass
Measurement Range 1000 - 5e-10 mbar (750 - 5e-10 Torr), max. overpressure 4 bar abs.
Accuracy 1000 - 10 mbar: < 30 % from reading
10 - 1e-8 mbar: < 10 % from reading
Repeatability ±2 % (10 - 1e-2 mbar), 5% (1e-2 - 1e-8 mbar)
Response Time < 200 ms (2 s while switching BA emission current)
Emission Current Automatic switching 10 µA, 100 µA, 1 mA, 2 mA
Degas Ohmic heating of the anode
Voltage Supply 20 - 30 VDC
Electrical Connection VSH88D/DL, VSH89D/DL:  SubD,  15pol., male, lockable
VSH88E, VSH89E: M12 circular connector, female, lockable,
1x A standard, 5pol., 2x D coded, 4pol.
Power Consumption Max. 8 W, additional 1 W f. degas and 0.8 W f. EtherCAT/relays/LCD
Operating Temperature +5...+60°C
Storage Temperature -40...+65°C
Maximum Bake Out Temperature 180°C at the flange (electronic detached)
Output Signal 0 - 10 VDC, measuring range 1.219 - 8.6 VDC, log., 0.6 V/decade
load resistor > 10k W  (VSH88D/DL, VSH89D/DL)
Serial Interface RS485: 9.6 kBd to 115 kBd, address switch 1 - 16
Switch Points 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
Vacuum Connection DN 40 ISO-KF (VSH88), 
DN 40 CF-F (VSH89)
Protection Class IP54 (VSH88E, VSH89E), 
IP40 (VSH88D/DL, VSH89D/DL)
Weight Approx. 555 g

vsh82-kennlinie

Vout /V = 0,6 log (p/mbar) + 6,8
p /mbar = 10( (Vout /V – 6,8) / 0,6 )

Additional Info

Additional Info

Weight:
2.00 LBS
Shipping:
Calculated at Checkout