Heating Jacket
Ebara Heater blanket
Chemical resistance, suitable for moisture and abusive environments, rapid heat-up, steady temperature maintenance, uniform heat distribution, cost effective!
**All products are 1 year warranty
Technology
- Evenly heat distribution
- Built-in high/Low limit alarm thermostat
- Patented Ground heating element
- Cleanroom compatible material
- Built-in controlling with adjustable temperature
- Multi-stand resistance wire
High Temperature Systems
Custom design system by our leading engineer to guarantee correct amount of insulation, energy efficient and touch-safe
Applications
Gas lines, Exhaust lines, Forelines, Abatement, Valve, Thanks, Drums, vessels, Laboratory equipment, Analytical equipment, Vacuum Bake-out, Emission testing, Fluid delivery test
- Temperature range
- Up to 300 C for class 10 clean room
- Up to 593 C for class 100 clean room
- All system components heated and insulated including fittings
- Diameters as small as 1/4"
- Uniform temperature throughout entire line
- Patented grounded heating element
- Built-in controlling and high/low limit alarm thermostat
- 120-600 VAC or DC, single or three phrase, 50 or 60Hz
High Temperature Systems
Custom pump line heating system to reduce build up of solids in LPCVD, PECVD, and metal etch vacuum piping systems. It helps reduce particle generation and eliminate unscheduled maintenance downtime and improving the consistency of yield.
Applications
LPVCD: Silicon nitride, Titanium nitride, Metal etch: Aluminum, Tungsten, Copper CVD: Tungsten, TEOS R&D systems, PVD, Diffusion furnaces, FPD
- Compliant with global guidelines and spec including UL, CF, NEC and SEMI-S2-93
- Even Heating up to 150 C to eliminate cold spots
- Easy on-off with reclosable fastens
- Modular heating system combine both standard and custom line
- Precision electronic temperature controllers and software
- Adjustable temperature
- Silicon rubber construction for cleanroom
- Reinforced silicone rubber fabric used on both heater and jacket
- Standard voltage 120 and 208 VAC
- Heaters interconnectable up to a 15A circuit
| PN | TUBE O.D (inch) | LENGTH (inch) | WATTS |
| W03005685 | 1.5 | 3 | 26 |
| W03005685-T | 1.5 | 3* | 18 |
| W05606085 | 1.5 | 6 | 51 |
| W05606085-T | 1.5 | 6* | 44 |
| W03007785 | 2 | 3 | 34 |
| W03007785-T | 2 | 3* | 24 |
| W060077106 | 2 | 6 | 68 |
| W060077106-T | 2 | 6* | 59 |
| W03011787 | 3 | 3 | 44 |
| W03011787-T | 3 | 3* | 30 |
| W06011790 | 3 | 6 | 88 |
| W06011790-T | 3 | 6* | 74 |
| W11712082 | 3 | 12 | 175 |
| W050149501-T | 5* | 90 | |
| W06014982 | 4 | 6 | 111 |
| W06014982-T | 4 | 6* | 94 |
| W12014983 | 4 | 12 | 222 |
* -T: Trim to Length Heaters
Standard insulation thickness is 1/2 and 1/4, contact us for additional options