Flange and Fittings

Commonly used in downstream of the chamber

Size from 0.7” to 2.0” 

Certified and traceable material

100% leak checked

Consistent quality from lot to lot

Available in stainless or aluminum

Size from 2.5” to 12” 

Certified and traceable material

100% leak checked

Consistent quality from lot to lot

Available in stainless or aluminum

Size from 1.33” to 12”

Certified and traceable material

100% leak checked

Consistent quality from lot to lot

Available in stainless only

Tube size indicates the OD dimension vs a pipe which indicates the ID dimension

Consists of:  Elbow, Tee, Reducer and 4,5,6 way cross

Size from 0.25” to 12”

From flange to flange

From flange to a threaded, a barb, face seal or compression fitting

Common pipe thread is from 1/8” to 3/4”

Compression fitting up to 1 ½”

Used for motion transfer from atmosphere to vacuum.  

Extremely flexible

Most common material is SUS 316 or AM350

Other available materials: Titanium, Inconel, and Hastelloy,

Used for alignment or vibration isolation.  

Available in thin wall (0.006”) or medium wall (0.008”-0.012”)

Standard material is SUS316.

Available in any flange types

Sizes up to 8” (ISO320)