Screw Pump
Vacuum thin-film industry has been looking for a pump that is clean (oil free), long lasting and universally applicable to all processes such as Etch, CVD and PVD. Dry Screw Pump is invented to do just that.
Operating Principle
Dry Screw Pump consists of precision-grind and matching pair of screws that makes no contact (no wear). The pump is suitable for clean as well as harsh and corrosive environment. It uses no oil and has the shortest gas discharge path which makes this pump more efficient than any other style dry pump available on the market.
Unlike Scroll pump which deteriorates with usage from day one, dry screw pump maintains vacuum integrity year after year without requiring service. Cost of ownership is lower than Scroll Pump. More than 60,000 screw rotors are produced each year.
VPC pump is built with superior technology to achieve excellent vacuum performance and low running costs. The highly intelligent dry pump is ideal for replacing wet pumps as well as Scroll Pumps.
Characteristics of VPC Dry Vacuum Pump
Short Gas Path and Reduce the Contamination of Process Gas: Comparing to other type of dry vacuum pump, VPC screw vacuum pump has the shortest gas path in the industry; minimizing contamination such as condensing. Screw rotors can play as a powder transmission mechanism. It runs well even in the presence of contamination. Patented rotor profile can provide rotor excellent sealing effects thus a larger clearance is allowable in between. Pump rotor wearing and rotor jam by the process contamination can be reduced by larger allowable clearance.
Simple Structure Reduce the Chance of Unexpected Pump Stop and Easy for Overhaul Process: Screw type vacuum is composed by a pair of screw rotors and no isolation plates are required in different stages of pumping chamber. Process contamination between rotors and isolation plates can also be avoided. Overhaul VPC dry pump is much easier than other type of dry pump. The repair time is shorter and the cost is lower.
Remote Control Software Can Protect Pump during abnormal situations: Microprocessor monitors running status at various pump parameters. Pump can be easily operated and monitored at the operation panel. Remote control software helps customer to monitor the pump’s running status remotely.
- Features and Benefits
- Environment friendly, low operating costs – no oil, no waste disposal cost
- Minimum downtimes, maximum ruggedness.
- Modular accessories meeting the demands of challenging process requirements.
- Low maintainence. Easy to service.
Screw pump Series: PS, PD, PSE
| PS Series Screw Pump | PD Series Screw Pump |
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PS: Standard single stage pump. Water-cooled motor PD: Low energy, double stage pump. Water-cooled motor |
PSE: Air cooled motor PDE: Air cooled motor |
Heat exchanger is available (optional) as an integral part of cooling system at minimal cost
Explosion-proof motor is available upon request; used for Pharmaceutical & Chemical application
PSE pump size (m3/hr): 80, 160, 180, 602, 902, 1302, 1802
| Series | Size | Type | Casing Air-Cooled Kit | Controller | Basic Controller | Coating | Inverter [1] |
| PSE | 80 | T | ✓ | D | 1 | ||
| 160 | S | N | |||||
| 180 | N | ✓ | H | ||||
| 602 | F | ✓ | C | 2 | |||
| 902 | G | ✓ | ✓ | ||||
| 1302 |
[1] Inverter: 1: Booster with Inerter. 2: Booster and Screw pump with Inverters.
Ex: PSE602-GD1: 602 Model contains Casing Air-Cooled Kit, Controller, Defric Coating and Inverter.
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PS Series
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PD Series
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Pump Type: A, H, G
| Pump | Controller | N2 heater | Air cool Kit | Inverter | |
| A | x | x | 1 or 2 | ||
| H | x | x | x | 1 or 2 | |
| G | x | x | x | 1 or 2 |
Coating Type: D, N, H, C
| Coating | Clean Process | Corrosive Process | Powde Process | Sticky Process | |
| D | Defric | ✓ | |||
| N | Ni | ✓ | ✓ | ||
| H | Ni-Teflon | ✓ | ✓ | ✓ | |
| C | NMC | ✓ | ✓ | ✓ | ✓ |
NMC: Nano Modified Ceramic
| Part number system: Pump model # -- Type -- Coating Material -- Inverter -- Special |
Example:
PS602-HN1
PS80 pump + PR600 Booster + Advance controller + N2 heating + Ni coating + one Inverter
| PS Specification |
PS series pump down to an ultimate vacuum of 7.5 x 10-4 Torr. PS is robust and designed to work under harsh environment. The cost of ownership is lowest among competing technologies. You get all the reliability and performance for the processes.
| Technical Data for PS Series Dry Vacuum Pump Specification | |||||||||
| Model | Unit | PSE80 | PSE160 | PSE180 | PSE602 | PSE902 | PSE1302 | PSE1802 | |
| Pumping Speed | L/min | 1300/1600 | 2150/2600 | 2500/3000 | 8300/10000 | 12500/15000 | 17500/21000 | 25000/30000 | |
| m²/hr | 80/96 | 130/156 | 150/180 | 500/600 | 750/900 | 1050/1260 | 1500/1800 | ||
| CFM | 47/57 | 77/92 | 88/106 | 294/353 | 441/530 | 618/742 | 883/1060 | ||
| Ultimate Pressure | Torr | ≤7.5 x 10⁻³ | ≤7.5 x 10¯⁴ | ||||||
| Motor | Voltage | V | 220~380 (50/60 Hz) | ||||||
| Rated Power | kW | 3.75 | 5.6 | 5.6 | 3.75+3.75 | 5.6+3.73 | 5.6+5.6 | 5.6+5.6 | |
| Connection | Inlet | NW50 | ISO100 | ISO160 | |||||
| Outlet | NW40 | ||||||||
| N2 | Pressure | Mpa | 0.05 | ||||||
| Dilute Flow | SLM | 0~60 (Process Dependent) | |||||||
| Sealing Flow | SLM | 6~8 | |||||||
| Connection | Swagelok 1/4" | ||||||||
| Dim | L x W x H | Inch | 51x20x22 | 51x20x23 | 51x20x23 | 51x20x31 | 51x20x32 | 51x20x34 | 55x20x34 |
| Weight | Lbs | 662 | 750 | 805 | 1004 | 1158 | 1267 | 1235 | |
| Noise | dB(A) | 68 | 70 | 70 | 70 | 70 | 70 | 70 | |
| Interface | SEMI E73-0299 | ||||||||
| Operation Temp. | °F | 41°F ~ 104°F | |||||||
| Operation Moisture | RH | ≤90% | |||||||
| PS Pumping Speed Curve |
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| PS Pumping Speed Curve (With Inverter) |
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| PS Pumping Speed Curve (With Switch) |
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| PD Specification |
PD series sets new benchmark in high-energy efficiency. It is environmentally friendly, and with low power consumption. PD series give you all the reliability and performance you want with less utilities cost.
| Technical Data for PD Series Energy Saving Dry Vacuum Pump Specification | ||||||
| Model | Unit | PDE120 | PDE300 | PDE400 | PDE500 | |
| Pumping Speed | L/min | 1300/2000 | 4500/5500 | 5550/6666 | 8333 | |
| m³/hr | 80/120 | 270/330 | 333/400 | 500 | ||
| cfm | 47/70 | 160/195 | 199/239 | 294 | ||
| Ultimate Pressure | Torr | ≤7.5 x 10⁻³ | ||||
| mBar | ≤1 x 10⁻² | |||||
| PA | ≤2 | |||||
| Air-cooled Motor | Frequency | Hz | 50/60 | |||
| Voltage | V | 220/380/440±5%（3Phase）50/60Hz | ||||
| Rated Power | kW | 3.73 | 7.5 | 15 | 15 | |
| Connection | Inlet | NW50 | ISO63 | DN80 | ||
| Outlet | NW40 | NW50 | ND50 | |||
| Cooling Water | Min Flow | L/min | 3 | 6 | ||
| Max Pressure | kg/cm² | 4 | ||||
| Pressure Dif | kg/cm² | 1 | ||||
| Temp. | °F | 64 ~ 77 | ||||
| Connection | RC 3/8" | RC 1/2" | ||||
| N2 | Pressure | Mpa | 0.05 | |||
| Purge Flow | SLM | 6~60 | 12~150 | |||
| Connection | Swagelok 1/4" | Swagelog 3/8" | ||||
| Dim | L x W x H | Inch | 46x21x24 | 54x23x24 | 72x31x31 | 72x31x30 |
| Weight | Lbs | 616 | 770 | 1903 | 1907 | |
| Noise | dB(A) | 70 | 72 | 80 | 80 | |
| System Max. Leak-rate | mbar l/s | 1X10¯⁵ | ||||
| Operation Temp | °C | 41°F ~ 104°F | ||||
| Operation Moisture | RH | ≤90% | ||||
| Interface | SEMI E73-0299 | |||||
| PD Series Pumping Speed Curves |
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| PD & PS Series Comparison of Power Consumption Curves |
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