Turbo Pump
| Model EBT |
Model EBT are mechnical-bearing, compound turbomolecular pumps which compliment line of Model EMT mag-lev turbomolecular pumps. Model EBT pumps are highly efficient, cost effective solutions to your high vauum pumping requirements. Model EBT compound turbomolecular pumps offer an extremely rugged, mechnical bearing design which provides clean, reliable vacuum generation for high tech manufacturing. Typical applications include semiconductor, thin film, photovoltaic, and analytical instruments. Model EBT of compound turbomolecular pumps can be mounted in any orientation. These pumps offer high pumping speed and high, light gas compression, making them ideal for UHV and analytical systems.
Applications
- Surface Treatment
- Analytical Instrument Lamps
- Electron / X-Ray Tubes
- Ion / EB-Source
- Sputter
- Glass / Film Coating
- Exhaust Carts
Options
- Natural Air or Water Cooling
- Vent Valve Kit
- Electron / X-Ray Tubes
- Ion / EB-Source
- Sputter
- Glass / Film Coating
- Exhaust Carts
- Features and Benfits
- Rugged Bearing Design Ideal for Mobile Applications
- High Pumping Speeds
- High Compression Ratios for light gases
- Fast Starts and stops
- Quick Venting (No Vent Pulsing)
- Fan or Water Cooling
- ISO or Conflat (CF) Flanges
- Integrated Controller (Select Models)
Specifications
| Model | EBT70 | EBT220 | EBT240 | EBT350 | EBT450 | EBT800 | EBT1100 | EBT1400 | 1BT2400 | ||
| Pumping Speed, L/s | N2 | 75 | 220 | 240 | 350 | 450 | 820 | 1100 | 1400 | 2400 | |
| H2 | 45 | 100 | 160 | 210 | 240 | 650 | 720 | 750 | 1100 | ||
| Compression Ratio | N2 | 1 X 108 | |||||||||
| H2 | 1 X 105 | 4.0 X 102 | 4.0 X 104 | 2.0 X 103 | 1.0 X 104 | 4.3 X 103 | 1.4 X 104 | ||||
|
Ultimate Pressure
CF ISO-R
|
Pa | < 1 X 10-7 | < 1 X 10-6 | < 5 X 10-7 | < 1 X 10-6 | - | |||||
| Torr | < 7.5 X 10-10 | < 7.5 X 10-9 | < 3.8 X 10-10 | < 7.5 X 10-9 | - | ||||||
| Pa | < 5 X 10-7 | < 1 X 10-6 | |||||||||
| Torr | < 3.8 X 10-9 | < 7.5 X 10-9 | |||||||||
| Recommend Backing Vacuum Pump | L/min | >25 | >80 | >250 | |||||||
| CFM | >0.88 | >2.85 | >8.80 | ||||||||
| Startup Time | min | 2.0-2.5 | 1.0-1.2 | 5.5-6.0 | 2.0-2.5 | 7.0-9.0 | 5.5-7.0 | 5.0-7.0 | |||
| Cooling Type | Air (Fan)/ Convection | Air (Fan) / Water | |||||||||
|
Weight
CF ISO-R
|
kg | 5.0 | 8.0 | 10.5 | 9.0 | 10.0 | 27.0 | 28.0 | 30.0 | - | |
| lb | 11.0 | 17.6 | 23.1 | 19.8 | 22.0 | 59.5 | 61.7 | 66.1 | - | ||
| kg | 3.0 | 5.8 | 7.3 | 6.0 | 7.0 | 26.0 | 27.0 | 29.0 | 45.0 | ||
| lb | 6.6 | 12.0 | 16.1 | 13.0 | 15.4 | 57.3 | 59.5 | 63.9 | 99.2 | ||
Performance Curves
