Ebara pump

Air-cooled dry pump

Pumping speed from 9 cfm to 36 cfm

Highest water vapor pumping of any air-cooled dry pump

Preferred choice in load lock, PVD, analytical applications (LCMS, ICPMS), Oxygen Plasma Systems

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Vane pump

Air-cooled, Oil-sealed with speeds ranging from 5 cfm to 178 cfm

Rapid pumping and ability to handle vapor

Build-in anti-suckback valve to keep oil out of the system

Preferred choice for laboratory and light industrial application

Low maintenance

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Screw pump

Air-cooled or water-cooled dry pump

Pumping speed from 47 cfm to 1,060 cfm

Shortest pumping path of any dry pump

Well suited in abrasive and corrosive environment

Low maintenance

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Scroll pump

Lowest cost dry pump, oil free and clean environment

Pumping speed from 2.5 cfm to 43 cfm

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Turbo pump

Highly efficient, cost-effective solution to high pumping requirement

Pumping speed from 75 l/s to 2,400 l/s for nitrogen

Ultimate pressure to 10-9 Torr

Uses extremely rugged, mechanical bearing

Mounts in any orientation

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Trap

Captures oil fog, mist or smoke from exhaust of oil flooded vacuum pumps Seamless drawn housings – no welds to rust or vibrate apart

Rugged all steel construction

Compact low profile design

Easy field maintenance

Available in single-piece and coaxial style

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