Valve

VPC valve is designed for 3 million cycles with warranty of 1.5 million cycles (or 12 months). Valve body is made of 304 stainless steel. Welded bellows are made of AM350 for long life. To guarantee long lasting seal life, actuator housings are machined and honed to micron precision -- contrary to traditional tube-housing which are neither round nor straight

VPC's standard pneumatic valves up to 50mm are normally closed. Standard valves over 50mmare air-open / air-close. Valve size goes up to 630mm. Optional "pneumatic lock" is available.

All stainless steel gate valves featuring low maintenance, vibration and low particles

GVRP valves are plug-in compatible with standard valves; easily replace valves in the field. Valve body is vacuum brazed to give clean & long lasting performance.

GVPP has special "protection ring" that shields entire valve mechanism from process gas; perfectly suited for Etch, CVD or nano process with high particulate.

Compact, robust, the valve designed with solenoids and position indicator integrated, able to operate for over 6.5 million life cycles. It is HF resistent, while being compatible with VAT valves. 

Ideal for aluminum chamber such as CVD, PVD, ALD, Etch. It is also suited for interacting with X-ray such as cyclotron, or battery production such as Glove Box.

Ball Valve is ideal for isolating reactor, trap and scrubber on vacuum coating tool for harsh and corrosive environment. Down-stream of chemical reaction chamber is challenged by by-product deposition and particulate. Wiping action of the Teflon across the ball reduces particulate buildup, making this valve robust in particulate rich effluent streams.

Body, stem, ball and end caps are made of 316L stainless steel. Fluoroelastomers are used to seal the stem from atmosphere. PTFE (Teflon) seals around the ball to isolate processes. Blow-out proof stem, full bore with internal surface of Ra

Manual or Throttling

From 1” to 4”

Quick action

¼ turn to go from fully open to fully close

Shut-off or throttling

Available in stainless only

From 4” to 35”

Low profile for high conductance

Linear conductance control over a wide range of operation

Highly repeatable

Available in stainless or aluminum

Available in RS232 or 1-10V DC

Build-in diagnostics

Manual override for set up and maintenance

Position Indicatior

Solenoid: 3-way, 4-way

Valve Seal Kit/Repair Kit