Ball Valve
Offers straight-through, unimpeded flow. The wiping action of the Teflon across the ball reduces particulate buildup, making this valve robust in particulate rich effluent streams.
Ball valves are commonly used in MOCVD and CVD equipment down stream from chamber (for process control) or vacuum pump rack (for abatement control)
Ball valve has less wetted surface than poppet valve.
Body, stem, ball and end caps are made of 316L stainless steel. Fluoroelastomers are used to seal the stem from atmosphere. PTFE (Teflon) seals around the ball to isolate processes. Blow-out proof stem, full bore with internal surface of Ra < 0.4 give the valve extended life.
Heater jacket is available to reduce by-product condensation.
Features
- Vacuum rating of 1x10-8 torr
- Bakeable to 150°C (200°C intermittent)
- Manufactured from 316L stainless steel
- Particulate resistant ball/seat design lengthens the mean time to repair
- High conductance; straight through flow
- Service valve without removal from the system
- "Fail Safe" air-to-open, spring-to-close available
- 80-120 psig operating air pressure
- Available connection : Weld Tube, KF, ISO
Stainless Steel Pneumatic Ball Valve |
- Vacuum range: 1 x 10-8 Torr
- Leak test: 1 x 10-8 atm-cc/sec
- Bake temperature: 150 oC
- Life: 500,000 Cycle
- Operating Pressure: 80-120 psig
Pneumatic Ball Valve, single acting (Fail safe)
* Subject to change without notice
Pneumatic Ball Valve, double acting
* Subject to change without notice
Manual Ball Valve
* Subject to change without notice
All-Machined Ball Valve |
- Vacuum range: 1 x 10-8 Torr
- Leak test: 1 x 10-8 atm-cc/sec
- Bake temperature: 150 oC
- Life: 500,000 Cycle
- Operating Pressure: 80-120 psig
Manual Ball Valve
Part Number | Port Size | A | B | L | H | W | K | Port Size |
BVM-KF25 | 1" | 1.03 | 1.57 | 3.92 | 2.99 | 6.54 | 2.40 | 0.87 |
BVM-KF40 | 1-1/2" | 1.62 | 2.17 | 5.16 | 3.13 | 6.93 | 3.20 | 1.38 |
BVM-KF50 | 2" | 2.06 | 2.95 | 6.31 | 4.78 | 7.56 | 4.10 | 1.87 |
* Subject to change without notice