EP Series Tubings
316L Stainless Steel (EP Tubing) · Electropolished Inner Surface · Ultra Clean for Semiconductor / UHP Gas Systems
Features
- Materials:316L, 316L VAR, 316L VIM-VAR
- Standards:ASTM A269, A632, A312 or JIS G3459
- Sizes:ASTM A269/A632: 1/8" – 2 1/2"
- Process:ID electropolished to Ra ≤ 15 μin (0.38 μm), Ra ≤ 10 μin (0.25 μm), Ra ≤ 7 μin (0.18 μm), Ra ≤ 5 μin (0.13 μm); OD roughness Ra ≤ 40 μin (1 μm)
- Inspection:Visual inspection, surface roughness measurement, particle test, dew point, oil content, SEM, AES, XPS
- Cleaning:Ultrasonically cleaned, washed, rinsed; purged & dried with high-purity hot N₂ in ISO 5 cleanroom
- Packaging:Packed in ISO 4 cleanroom; ends capped; double PE bags; inner bag filled with 99.999% N₂
- Marking:Brand, material grade, specification, heat number
- Standard length: 20 ft, 2 m, 3 m, 4 m and 6 m
Materials (Chemical Composition)
| Grade | Standard | VPC Designator | C | Mn | P | S | Si | Ni | Cr | Mo |
|---|---|---|---|---|---|---|---|---|---|---|
| 316L | ASTM / JIS G3459 | 6L | ≤0.035① | ≤2.00 | ≤0.045 | ≤0.03 | ≤1.00 | 10.0–15.0 / 12.0–16.0 | 16.0–18.0 | 2.0–3.0 |
| 316L VAR | ASTM | 6LV | ≤0.03 | ≤1.50 | ≤0.045 | ≤0.01 | ≤1.00 | 10.0–15.0 | 16.0–18.0 | 2.0–3.0 |
| 316L VIM-VAR | ASTM | 6LW | ≤0.03 | ≤1.50 | ≤0.045 | ≤0.01 | ≤1.00 | 10.0–15.0 | 16.0–18.0 | 2.0–3.0 |
① For tubing OD < 1/2" or wall thickness < 0.049", carbon content may be allowed up to 0.04%.
Surface Roughness
| Tube O.D. (D) mm | External Surface (μin / μm) TEP / PEP |
Internal Surface (μin / μm) – TEP / PEP | ||
|---|---|---|---|---|
| A | B | C | ||
| 3.18 | Ra ≤ 40 (1.0) | – | – | Ra ≤ 15 (0.38) |
| 6.35 ≤ D ≤ 63.5 | Ra ≤ 40 (1.0) | Ra ≤ 5 (0.13) | Ra ≤ 7 (0.18) | Ra ≤ 10 (0.25) |
Dimensional Tolerance and Scope of Supply
| Tube O.D. (in.) | Wall Thickness (in.) | O.D. Tolerance in. (mm) | Wall Thickness Tolerance % | Length (m) | Length (ft) | Seamless | Welded |
|---|---|---|---|---|---|---|---|
| 1/8 | 0.028 | 0/+0.003 (0.08) | ±10 | 2 or 3 | — | ✓ | — |
| 1/4 | 0.035 | +0/−0.004 (0.10) | ±10 | 2 or 3 | — | ✓ | ✓ |
| 0.039 | ✓ | ✓ | |||||
| 3/8 | 0.035 | +0/−0.004 (0.10) | ±10 | 2 or 3 | — | ✓ | ✓ |
| 0.039 | ✓ | ✓ | |||||
| 0.049 | ✓ | ✓ | |||||
| 1/2 | 0.035 | +0/−0.004 (0.10) | ±10 | 4 or 6 | 20 | ✓ | ✓ |
| 0.039 | ✓ | ✓ | |||||
| 0.049 | ✓ | ✓ | |||||
| 3/4 | 0.049 | +0/−0.004 (0.10) | ±10 | 4 or 6 | 20 | ✓ | ✓ |
| 0.065 | ✓ | ✓ | |||||
| 1 | 0.049 | +0/−0.004 (0.10) | ±10 | 4 or 6 | 20 | ✓ | ✓ |
| 0.065 | ✓ | ✓ | |||||
| 1 1/2 | 0.065 | +0/−0.008 (0.20) | ±10 | 4 or 6 | 20 | ✓ | ✓ |
| 2 | 0.065 | +0/−0.010 (0.25) | ±10 | 4 or 6 | 20 | ✓ | ✓ |
| 2 1/2 | 0.065 | +0/−0.010 (0.25) | ±10 | 4 or 6 | 20 | ✓ | ✓ |
Data per EP series sizing; actual supply per latest drawing/spec.
Working Pressure at Ambient Temperature
| Tube O.D. (in.) | 0.028 | 0.035 | 0.039 | 0.049 | 0.065 |
|---|---|---|---|---|---|
| 1/8 | 8500 | — | — | — | — |
| 1/4 | — | 5100 | 5700 | — | — |
| 3/8 | — | 3300 | 3700 | 4800 | — |
| 1/2 | — | 2600 | 3000 | 3700 | — |
| 3/4 | — | — | — | 2400 | 3300 |
| 1 | — | — | — | 1800 | 2400 |
| 1 1/2 | — | — | — | — | 1600 |
| 2 | — | — | — | — | 1200 |
| 2 1/2 | — | — | — | — | 950 |
Elevated Temperature Factors
| °F | °C | Factor |
|---|---|---|
| 200 | 93 | 1.00 |
| 400 | 204 | 0.96 |
| 600 | 315 | 0.85 |
| 800 | 426 | 0.79 |
| 1000 | 537 | 0.76 |
Example: For 1/2 in. OD × 0.035 in. wall EP tubing at 600 °F (315 °C):
Ambient working pressure = 2600 psig → × 0.85 = 2210 psig.