FFKM O-Rings
Our O-Ring are tested under various corrosive condition. Results indicated less corrosion than chemrez.
Features and Benefits:
- For CVD and ETCH
- Kalrez equivalent
- Resistence to NF3
- Good chemical reisistance
- Unique bonding structure
- Low compression set
- Temperature range: 250℃
LOWER COST
SUPERIOR PERFORMANCE
| Specification | S705 | S505E |
|---|---|---|
| Kalrez Equivalent | K9100 | - |
| Color | White | White |
| Hardness | 74 | 82 |
| Tensile Strength (MPa) | 11.4 | 14.1 |
| Elongation (%) | 195 | 260 |
| Modulus @100% (MPa) | 4.8 | 5.1 |
| Compression Set (72h @200℃) | 24.2 | 32.1 |
| Max Service Temperature (℃) | 250℃ | 250℃ |
Test data at customer site indicates S705 is superior than chemrez in corrosion resistance.
1) Tool / Process / Wafer size – MATTSON Paradigm / Ashing / 300MM
2) Test Period - 2012.03~2012.04 (1PM, RF 350 TIME)
3) Seal Location/ Size - LID DOME / AS-383 ID804×3.53 / ID446×3.53 /AS-277/AS-278/AS-279/AS-224/AS-035/AS-205/AS-208/AS-230 / Total 11 part
| S** S705 | K** K9100 | |
| Normal |  |
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| Microscope ×50 |  |
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| Microscope ×50 (Cross-section) |  |
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*SSK S705 shows much less etch rate against Plasma & Chemical
Thermo Gravimetric Analysis – S705
Measures weight changes in a material as a function of temperature (or time) under a controlled atmosphere. Its principal uses include measurement of a material’s thermal stability and composition.
