Heating Jackets
Ceramic Fiber Cloth Heater Jackets
Pump line heating systems work to reduce buildup of solids in many LPCVD, PECVD, CVD, FPD, ALD and metal etch vacuum piping systems. This reduction in buildup helps reduce particle generation and eliminates unscheduled maintenance downtime, improving the consistency of yields and saving time and money. Pump line heating systems are compliant with global guidelines and specifications including UL®, CE, and SEMI S2-93.
Key Features
- Standard operating temp up to 220°C
- Up to 593°C (1100°F) for class 100 cleanrooms
- Standard diameters as small as ¼” and up to 8”
- Modular heating system
- Easy on-off installation
- Energy Efficient Design
- Long service life, 10+ years
Technology
- High temperature capabilities
- Standard operating temp up to 220°C
- Up to 250°C (482°F) for class 10 cleanrooms
- Up to 593°C (1100°F) for class 100 cleanrooms
- All system components are heated and insulated
- Standard diameters as small as ¼” and up to 8”
- Heaters available for flanges, valves, custom components etc.
- Uniform temperatures throughout entire line
- Modular heating system
- Easy on-off installation with reusable hook and loop fasteners
- Energy Efficient Design
- Patented grounded heating element
- Exceptional Durability and Quality construction
- Long service life, 10+ years
Applications
- LPCVD
- Silicon nitride
- Titanium nitride
- Metal etch
- Aluminum
- Tungsten
- FPD
- CVD
- Tungsten
- TEOS
- PECVD
- Silicon nitride
- ALD
Utilization
- Gas lines
- Exhaust lines
- Forelines
- Abatement
- Valves
- Tanks, drums, cylinders, vessels
- Laboratory equipment
- Analytical equipment
- Vacuum bake-out
- Emission testing
- Fluid delivery testing
- Any small, unique geometry
Customizable Options
- Voltage Options
- Power plug / Connector
- Built-in controlling / High limit thermostat
- Built-in low-limit alarm thermostat
- Insulation thickness and type
- Temperature sensor type
- Cloth jacket material options for higher temperature needs
Specifications
Operational
- Standard operating temperature up to 220°C (428°F), higher temperatures available
- Built-in controlling / High limit thermostat, standard at 260°C
- Built-in low limit alarm thermostat
Power
- 120-600 VAC or DC
- Single- or three-phase
- 50 or 60 Hz
Standard Materials
- Facing - Outside cloth material (PTFE, Samox®, Fiberglass)
- Liner - Inside material, touching surface of heated object (PTFE, Samox®, Fiberglass)
- Insulation - Placed in between liner and facing closure (Fiberglass, Glassmat, Ceramic Materials)
- Power Connector Options - MNL and CPC
- Sensor Options - Standard RTD or J Type, K Type thermocouple options
- Multi-strand resistance wire