Low Particle

Low Particle(LP) poppet valve was field tested and proven to improve yield in a harsh or corossive environment such as Etch or CVD processes.  The entire mechanisms are shielded and completely cleared from gas flow, thus creating a very clean environment.  Can be installed upstream of the chamber if necessary.  Sizes available in 1.0", 1.5" and 2.0". To specify LP style, add -LP at the end of part number.  Example: AVP-KF25-LP.

• Vacuum range: 1 x 10^-9  Torr
• Leak test: 1 x 10^-9  atm cc/sec of He
• Bake temperature:  120^oC
• MTTF (life): 1,500,000 Cycle
• Time from open-close: < 0.5 sec
• Operating temperature: 20^o to 100^oC
• Differential pressure: 15 psi
• Position Indicator: 28 VDC or 115 VAC
• Operating pressure: 60 - 95 psi