Turbo Pumps
Turbomolecular Pumps
Model EBT are mechanical-bearing compound turbomolecular pumps that complement the EMT mag-lev line. They deliver clean, reliable high-vacuum performance with rugged bearings, high pumping speed, and strong light-gas compression. Typical uses include semiconductor, thin film, photovoltaic, and analytical instruments. EBT pumps can be mounted in any orientation, start/stop quickly, and are available with fan or water cooling, ISO or CF flanges, and (on select models) integrated controllers.
Overview & Features
• Rugged mechanical-bearing design (ideal for mobile applications)
• High pumping speeds
• High compression ratios for light gases
• Fast starts and stops; quick venting (no vent pulsing)
• Fan or water cooling; ISO or CF flanges
• Integrated controller (select models)
Surface treatment, analytical instrument lamps, electron/X-ray tubes, ion/EB source, sputter, glass/film coating, exhaust carts.
Natural air or water cooling kits, vent valve kit, ISO/CF flange variants, integrated controller options.
Specifications
| Item | EBT70 | EBT220 | EBT240 | EBT350 | EBT450 | EBT800 | EBT1100 | EBT1400 | EBT2400 | |
|---|---|---|---|---|---|---|---|---|---|---|
| Pumping Speed | N2 (L/s) | 75 | 220 | 240 | 350 | 450 | 820 | 1100 | 1400 | 2400 |
| H2 (L/s) | 45 | 100 | 160 | 210 | 240 | 650 | 720 | 750 | 1100 | |
| Compression Ratio | N2 | 1 × 108 | ||||||||
| H2 | 1 × 105 | 4.0 × 102 | 4.0 × 104 | 2.0 × 103 | 1.0 × 104 | 4.3 × 103 | 1.4 × 104 | |||
| Ultimate Pressure (CF ISO-R) |
Pa | < 1 × 10-7 | < 1 × 10-6 | < 5 × 10-7 | < 1 × 10-6 | — | ||||
| Torr | < 7.5 × 10-10 | < 7.5 × 10-9 | < 3.8 × 10-10 | < 7.5 × 10-9 | — | |||||
| Pa | < 5 × 10-7 | < 1 × 10-6 | — | |||||||
| Torr | < 3.8 × 10-9 | < 7.5 × 10-9 | — | |||||||
| Recommended Backing Pump | L/min | > 25 | > 80 | > 250 | ||||||
| CFM | > 0.88 | > 2.85 | > 8.80 | |||||||
| Startup Time | min | 2.0–2.5 | 1.0–1.2 | 5.5–6.0 | 2.0–2.5 | 7.0–9.0 | 5.5–7.0 | 5.0–7.0 | — | |
| Cooling Type | — | Air (Fan) / Convection | Air (Fan) / Water | |||||||
| Weight (CF / ISO-R) |
kg | 5.0 | 8.0 | 10.5 | 9.0 | 10.0 | 27.0 | 28.0 | 30.0 | — |
| lb | 11.0 | 17.6 | 23.1 | 19.8 | 22.0 | 59.5 | 61.7 | 66.1 | — | |
| kg | 3.0 | 5.8 | 7.3 | 6.0 | 7.0 | 26.0 | 27.0 | 29.0 | 45.0 | |
| lb | 6.6 | 12.0 | 16.1 | 13.0 | 15.4 | 57.3 | 59.5 | 63.9 | 99.2 | |
“—” = not specified on current sheet. Values are typical and subject to change.
Performance Curves
