UHP/High Purity Tubing Selection Guide

BA Series — High Purity BA Tubing (Bright Annealed)

Suitable for:

• High-purity gas systems
• General semiconductor processes
• UHP system front-end and utility sections

Key Features:

Material: 316L

Internal surface: Bright Annealed cold worked + annealed

Internal roughness: Ra ≤ 20 μin (0.51 μm)

Cleanliness levels: 
FC-01: immersion rinsing, air purging
FC-02: ultrasonic cleaning, nitrogen drying and purging

Standard tubing sizes: 1/8" to 2-1/2"

Packaging: Single polyethylene bag, capped ends

When to choose BA:

• Electropolishing is not required
• Cost-sensitive applications
• High-purity but not ultra-high-purity equipment, general gas distribution, backplanes, and facility piping

EP Series — High Purity Electropolished Tubing

Suitable for:

• Ultra High Purity gas delivery
• Semiconductor critical process lines
• H2, O2, N2, CDA, UHP chemical supply

Key Features:

Material: 316L / 316L VAR / 316L VIM-VAR

Internal surface: Electropolished

Surface roughness options:

• Grade A: Ra ≤5 μin (0.13 μm)
• Grade B: Ra ≤7 μin (0.18 μm)
• Grade C: Ra ≤10 μin (0.25 μm)
• Grade D: Ra ≤15 μin (0.38 μm)

Cleaning: ISO 5 cleanroom ultrasonic cleaning

Packaging: ISO 4 cleanroom, double bag, 99.999% N₂ filled

Tubing sizes: Same as TBA: 1/8" to 2-1/2"

When to choose EP:

• Ultra High Purity/ High Purity
• EP-grade surface finish is needed
• For semiconductor process tools, gas panels, VMB/VMP
• Customer requires VAR or VIM-VAR grade materials