Semiconductor gas delivery systems demand absolute reliability, purity, and safety. Different valves are designed to solve different operational challenges — from isolating process gases to ensuring leak-tight vacuum performance.
This guide provides a clear, application-driven overview to help engineers, buyers, and facility managers quickly identify the most suitable valve type for each part of the gas system.
Best for: Ultra-High Purity (UHP) gases and critical process isolation
(Gas Cabinets, VMB/VMP, Gas Panels, MFC Upstream/Downstream)
Diaphragm valves use a Cobalt alloy diaphragm to achieve extremely clean, leak-free sealing. They are the industry standard for process gases in semiconductor manufacturing.
Best for: Secondary containment system, high temperature, prevents leaks to atmosphere
Bellows-sealed valves use a stainless steel bellows to used to restrict flow to precise levels as a handle is spun, pressing an actuator onto the bellows.
Best for: High flow, utility gases, and fast shut-off
(N₂, CDA, inert gases, purge and vent systems)
Ball valves provide large flow capacity (high Cv) and simple quarter-turn actuation. They are highly effective in utility and non-critical flow lines.
Best for: Backflow prevention and system protection
(MFC protection, VMB safety, cylinder refill lines)
Check valves ensure that gases only flow in one direction, preventing contamination, equipment damage, or unsafe reverse flow conditions.
Best for: Precision manual flow control in clean applications
(Purge control, leak testing, R&D tools)
These valves are tailored for manual fine-tuning of low flow rates. They are not intended for shut-off in process gas lines but are excellent in controlled micro-flow applications.
