Pressure Regulator Selection Guides

Choosing the Correct Regulator Based on Flow, Pressure, and Application Needs

Semiconductor gas delivery systems require regulators that can deliver stable outlet pressure, ultra-clean wetted surfaces, and high reliability across a wide range of gas types — from inert bulk gases to toxic corrosive process gases.

VPC regulators are built with 316L VAR / VIM stainless steel, Hastelloy options for corrosives, and Class-100 cleanroom assembly, giving them compatibility with applications from Bulk Gas → Facility → VMB/VMP → Hook-Up → Tool-Level Control.

This Selection Guide explains each regulator series in simple, application-driven language, making it easy for buyers and decision makers to choose the correct model.

1. Bulk Gas / Cylinder Regulators (High Pressure to Low Pressure)

VPC1000 Series — High Pressure, General-Purpose Precision

Best for: Gas cylinders (O₂, H₂, N₂, CO₂, Ar), high inlet pressures up to 4,000 psig, labs, industrial, and high-pressure semiconductor applications.

Why Choose VPC1000

Handles high inlet pressures safely
Compatible with both corrosive and inert gases
Clean internal surface (Ra 10–15 μin)
Cv = 0.06–0.2 for precise cylinder pressure control

Typical Use

Gas cylinder at source
Transition from cylinder to facility sub-main piping

VPC2000 Series — High Purity, High Flow Facility Regulator

Best for: Facility main and sub-main piping for inert and corrosive gases, high purity bulk gas distribution.

Why Choose VPC2000

Electropolished internal passages for high purity
Autogenous welds with no virtual leak cavities
Cv up to 1.0 for robust facility-level flow
Handles toxic, inert, or corrosive gases reliably

Typical Use

Facility distribution lines (main and sub-main)
Bulk N₂, CDA, and process gas distribution

VPC2500 Series — Higher Flow Version of VPC2000

Best for: Same applications as VPC2000 but requiring even larger flow, especially facility-level main gas supply to VMB/VMP.

Why Choose VPC2500

Cv up to 1.8
Same electropolished, welded high-purity design as VPC2000

Typical Use

High-demand sub-main lines
High-volume inert gas supply

VPC3000 Series — Ultra High Flow Facility Regulator

Best for: Very large flow (Cv = 5 / 10 / 15 / 20) for bulk supply of N₂, CDA, and inert gases in cleanroom facility distribution.

Why Choose VPC3000

The highest-flow regulator in the facility series
Designed specifically for main-line pressure reduction

Typical Use

Main trunk lines and gas yards
N₂ blanketing and high-volume purging

VPC7500 Series — Two-Stage Regulator (Most Stable Delivery)

Best for: Applications needing extremely stable outlet pressure with large inlet pressure drops (e.g., full → empty cylinders), HP and UHP specialty gas cylinders.

Why Choose VPC7500

Extremely low supply pressure effect
Best stability (0.06 psig / 100 psig inlet change)
Ideal for toxic gases (PH₃, AsH₃, B₂H₆, SiH₄ mixtures)

Typical Use

Silane / PH₃ / AsH₃ cylinders
High-end specialty gases used in semiconductor processes

2. Point-of-Use / Hook-Up Regulators (Precise, Local Pressure Control)

VPC4000 Series — High-Performance Point-of-Use Regulator

Best for: Hook-up lines, process equipment inlet, and sensitive process tools needing stable pressure.

Why Choose VPC4000

Cv = 1.0
Designed specifically for modern semiconductor tools
Ultra-clean internal passages (Ra = 10 μin)
Handles corrosive, toxic, and specialty gases

Typical Use

AMAT / TEL / Lam tools inlet
UHP process tool pressure regulation

VPC5000 Series — Ultra Clean, High Integrity Regulator

Best for: UHP gas cabinets, extremely sensitive processes requiring zero contamination, ultra clean and leak-tight specialty gas control.

Why Choose VPC5000

Metal-to-metal diaphragm seal
Minimizes particle generation
Best choice for corrosive specialty gases

Typical Use

Gas cabinet outlet
High purity process gas lines
Replacement for Veriflo and Tescom regulators

3. Micro / Compact Regulators (Surface Mount & Miniature Tools)

VPC Micro Series — Compact, High Purity Regulator

Best for: Small footprint tools, hook-up and equipment modules, low internal volume and fast response systems.

Why Choose VPC Micro Series

Cv = 0.06, flow up to 100 slpm
Very low internal volume for fast response
Matches Veriflo Quantum dimensions for easy retrofit

Typical Use

Compact tools and hook-up modules
Equipment where space and internal volume are limited

VPC Micro SM — Surface Mount Micro Regulator

Best for: Surface-mount (SMS) modular manifold panels and high-density gas delivery modules.

Why Choose VPC Micro SM

Meets SEMI modular interface standards
Smallest wetted volume among micro regulators
Easy retrofit on modular gas box platforms

Typical Use

Surface-mount manifold panels
High-density gas boxes and compact modules

Quick Decision Guide

If you are reducing pressure directly from high-pressure cylinders → VPC1000.
If you need a high-purity, high-flow regulator for facility distribution → VPC2000.
If your facility requires more flow than VPC2000 can provide → VPC2500.
If you need ultra-high-flow regulation for main facility distribution → VPC3000.
If you require high-performance pressure control at the tool inlet → VPC4000.
If you need UHP point-of-use or gas-cabinet outlet regulation → VPC4000 or VPC5000 depending on purity requirements.
If your inlet pressure fluctuates heavily → choose a two-stage regulator such as VPC7500.
If you need compact size, high purity, and fast response → VPC Micro.
If you need a surface-mount solution for SMS manifolds or compact modular gas panels → VPC Micro SM.

Flow Capacity (Cv)	Regulator Series	Application	Use / Line	Inlet / Outlet Pressure Range	Connector Size
0.15–0.2	VPC1000	Bulk Gas system with non-toxic gas	Gas cylinder, sub pipe	4000 PSIG / 30, 100, 300, 500 PSIG	¼” to ½”
0.85	VPC2000		Main & sub pipe	500 PSIG / 30, 150 PSIG	½” to ¾”
1.8	VPC2500		Main & sub pipe	500 PSIG / 30, 150 PSIG	½” to 25A
5.0–8.0	VPC3000		Main pipe	300 PSIG / 50, 250 PSIG	1” to 25A
0.06–1.55	VPC4000	Specialty gas system	Hook-up, point of use	250 PSIG / Vacuum to 30, 100 PSIG	½” to ½”
0.06	VPC5000		Gas cabinets	4000 PSIG / 20, 100, 300, 500 PSIG	½” to ½”
0.06	VPC Micro		Hook-up / equipment	250 PSIG / Vacuum to 30, 100 PSIG	¼”

Gas Cylinder (High Pressure Input) → Choose VPC1000 (single stage) → VPC2000 (standard high purity) → VPC2500 (higher flow) → VPC3000 (very large flow) → VPC7500 (two-stage, highest stability).
Point-of-Use (Tool Hook-Up) → Choose VPC4000 for modern semiconductor tools, or VPC5000 for UHP gas cabinets and corrosive gases.
Compact Equipment / Surface Mount → Choose VPC Micro for compact tools, or VPC Micro SM for surface-mount SMS manifolds.