Absolute Pressure 1000 to 5 x 10-10 mbar
The digital combination transducer VSH (Pirani/hot cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors.
Smartline represents cutting edge technology providing safe, precise and cost effective process control.
Benefits
- Wide range sensor Pirani / Bayard Alpert
- Pirani with extended range allows operation of hot cathode at lower pressure and increases lifetime
- Excellent accuracy and repeatability
- Bayard-Alpert with blowing resistant, yttrium coated double filament, insensitive against inrush of air
- Digital RS485 interface and analog output signal 1.219-8.6 V or EtherCAT
- Automatic baud rate detection 9.6 kBd to 115 kBd
- Two independent, potential-free relay switch points
- Optionally with large, integrated LCD display with background illumination (VSH88DL, VSH89DL)
- Easily replaceable sensor heads with stored calibration data
Typical Applications
- Coating plants and vapor deposition
- Sputtering plants
- Analysis technology
- Measuring and controlling in the fine and ultrahigh vacuum range
- Vacuum furnaces
- Process engineering
- Space simulation chambers
| Measuring Principle | Pirani / Bayard Alpert, depending on gas type |
| Materials In Contact With Vacuum | Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass |
| Measurement Range | 1000 - 5e-10 mbar (750 - 5e-10 Torr), max. overpressure 4 bar abs. |
| Accuracy | 1000 - 10 mbar: < 30 % from reading 10 - 1e-8 mbar: < 10 % from reading |
| Repeatability | ±2 % (10 - 1e-2 mbar), 5% (1e-2 - 1e-8 mbar) |
| Response Time | < 200 ms (2 s while switching BA emission current) |
| Emission Current | Automatic switching 10 µA, 100 µA, 1 mA, 2 mA |
| Degas | Ohmic heating of the anode |
| Voltage Supply | 20 - 30 VDC |
| Electrical Connection | VSH88D/DL, VSH89D/DL: SubD, 15pol., male, lockable VSH88E, VSH89E: M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4pol. |
| Power Consumption | Max. 8 W, additional 1 W f. degas and 0.8 W f. EtherCAT/relays/LCD |
| Operating Temperature | +5...+60°C |
| Storage Temperature | -40...+65°C |
| Maximum Bake Out Temperature | 180°C at the flange (electronic detached) |
| Output Signal | 0 - 10 VDC, measuring range 1.219 - 8.6 VDC, log., 0.6 V/decade load resistor > 10k W (VSH88D/DL, VSH89D/DL) |
| Serial Interface | RS485: 9.6 kBd to 115 kBd, address switch 1 - 16 |
| Switch Points | 2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA |
| Vacuum Connection | DN 40 ISO-KF (VSH88), DN 40 CF-F (VSH89) |
| Protection Class | IP54 (VSH88E, VSH89E), IP40 (VSH88D/DL, VSH89D/DL) |
| Weight | Approx. 555 g |
 Vout /V = 0,6 log (p/mbar) + 6,8 p /mbar = 10( (Vout /V – 6,8) / 0,6 ) | |